Patent Assignment
Reel/Frame 063095/0360
Assignment of Assignor's Interest
Recorded: 2023-03-24
Pages: 5
Assignors
SASAMI, TAKESHI
Executed: 2023-03-10
SAGEHASHI, MASAYOSHI
Executed: 2023-03-10
YAMADA, KENJI
Executed: 2023-03-10
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
4-1, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, 100-0005, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process
Application:
18/126,098 →
Publication:
US 2023/0305398