Patent Assignment
Reel/Frame 063103/0252
Assignment of Assignor's Interest
Recorded: 2023-03-16
Pages: 4
Assignors
YOO, KWANG SUNG
Executed: 2023-03-03
YOUN, TAE HWAN
Executed: 2023-03-03
KIM, GEON JONG
Executed: 2023-03-03
Assignee
PSK INC.
48, SAMSUNG 1-RO 4-GIL, HWASEONG-SI, GYEONGGI-DO, 18449, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method