Patent Assignment
Reel/Frame 063151/0042
Assignment of Assignor's Interest
Recorded: 2023-03-29
Pages: 7
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2021-12-23
WARNAAR, PATRICK
Executed: 2022-02-10
BIJNEN, FRANCISCUS GODEFRIDUS CASPER
Executed: 2022-04-04
ZWIER, OLGER VICTOR
Executed: 2022-07-05
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
A Target for Measuring a Parameter of a Lithographic Process