Patent Assignment
Reel/Frame 063186/0369
Assignment of Assignor's Interest
Recorded: 2023-03-31
Pages: 4
Assignors
ZHANG, AIXIAN
Executed: 2023-02-06
LEE, JUNG HWAN
Executed: 2023-02-06
BAE, MIN KEUN
Executed: 2023-02-06
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Controlling Plasma Processing Apparatus and Plasma Processing Apparatus
Application:
18/193,897 →
Publication:
US 2024/0055229