Patent Assignment
Reel/Frame 063186/0584
Assignment of Assignor's Interest
Recorded: 2023-03-31
Pages: 3
Assignors
RITALA, MIKKO
Executed: 2021-05-20
HÄMÄLÄINEN, JANI
Executed: 2021-05-24
LESKELÄ, MARKKU
Executed: 2021-06-01
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Atomic Layer Deposition and Etching of Transition Metal Dichalcogenide Thin Films