Patent Assignment
Reel/Frame 063218/0449
Assignment of Assignor's Interest
Recorded: 2023-04-04
Pages: 4
Assignors
SALINAS, MARTIN JEFFREY
Executed: 2023-02-07
CONG, ZHEPENG
Executed: 2023-02-07
CHEN, HUI
Executed: 2023-02-07
LUAN, XINNING
Executed: 2023-02-07
ATANOS, ASHUR J.
Executed: 2023-02-15
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Detection and Analysis of Substrate Support and Pre-Heat Ring in a Process Chamber via Imaging