Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging
An apparatus, method, and system for identifying and obtaining information related to a substrate support and/or a pre-heat ring in a process chamber via imaging and image processing. In an embodiment, a substrate support is provided. The substrate support generally includes a top surface configured to receive a substrate in a process chamber and a marking feature disposed on the top surface of the substrate support, the marking feature configured to be detectable by an imaging apparatus coupled to the process chamber to provide information related to the substrate support via imaging when the substrate support is disposed within the process chamber.
1. A substrate support, comprising:
a top surface configured to receive a substrate in a process chamber, the top surface of the substrate support comprising a rim bordering a pocket, the pocket configured to receive the substrate; and
a marking feature disposed on the rim of the substrate support, the marking feature configured to be detectable by an imaging apparatus coupled to the process chamber to provide information related to the substrate support via imaging when the substrate support is disposed within the process chamber.
2. The substrate support of claim 1 , wherein the marking feature disposed on the substrate support corresponds to one of a plurality of models of substrate supports for identification of the model of the substrate support via imaging.
3. The substrate support of claim 1 , wherein the marking feature comprises a known dimension extending along the top surface of the substrate support, the known dimension providing direct scaling to the substrate support for imaging of the substrate support when the marking feature is imaged.
4. The substrate support of claim 1 , wherein the marking feature is configured to provide a reference point for determination of a rotation angle of the substrate support via imaging.
5. The substrate support of claim 1 , wherein the marking feature comprises a designation, shape, or pattern, including without limitation, a barcode, a numeric code, an alphanumeric code, a QR code, custom shapes, a pattern of shapes, symbols, and special characters.
6. The substrate support of claim 1 , wherein the marking feature is configured to provide a reference point for tracking an installation position of the substrate support in the process chamber via imaging.
7. A substrate support, comprising:
a top surface configured to receive a substrate in a process chamber, the top surface of the substrate support comprising a rim bordering a pocket, the pocket configured to receive the substrate; and
a marking feature disposed on the rim of the substrate support, the marking feature comprising a height extending from the rim of the substrate support and an outer surface containing silicon carbide (SiC), and wherein the marking feature is configured to be detectable by an imaging apparatus coupled to the process chamber when the substrate support is disposed within the process chamber.
8. The substrate support of claim 7 , wherein the marking feature is disposed on the substrate support by depositing SiC on the rim of the substrate support.
9. The substrate support of claim 7 , wherein the marking feature is disposed on the substrate support by etching a graphite core on the rim of the substrate support and coating or polishing an outer surface of the graphite core with SiC.
10. The substrate support of claim 7 , wherein a degradation level of the marking feature is configured to provide an indication of a remaining service life of the substrate support via imaging.
11. The substrate support of claim 7 , wherein changes in the height of the marking feature provides an indication of a remaining service life of the substrate support when the change in the marking feature is detected by the imaging apparatus.
12. A processing system configured to analyze a substrate support disposed in a process chamber, comprising:
a process chamber having a process volume;
an imaging apparatus coupled to the process chamber, the imaging apparatus having a view field;
a controller coupled to the imaging apparatus, the controller comprising a processor and a memory, wherein the memory includes a software program configured to perform an operation for imaging and obtaining information related to a substrate support disposed in the processing volume of the process chamber when the substrate support is in the view field of the imaging apparatus; and
wherein the substrate support comprises a top surface configured to receive a substrate in the process chamber, the top surface of the substrate support comprising a rim bordering a pocket, the pocket configured to receive the substrate; and
a marking feature disposed on the rim of the substrate support, the marking feature configured to be detectable by the imaging apparatus to provide information related to the substrate support via imaging when the substrate support is disposed within the process chamber.
13. The system of claim 12 , wherein the marking feature disposed on the substrate support corresponds to one of a plurality of models of substrate supports for identification of the model of the substrate support via imaging.
14. The system of claim 12 , wherein the marking feature comprises a known dimension extending along the top surface of the substrate support, the known dimension providing direct scaling to the substrate support for imaging of the substrate support when the marking feature is imaged.
15. The system of claim 12 , wherein the marking feature is configured to provide a reference point for determination of a rotation angle of the substrate support via imaging.
16. The system of claim 12 , wherein a degradation level of the marking feature is configured to provide an indication of a remaining service life of the substrate support via imaging.
17. The system of claim 12 , wherein the marking feature is configured to provide a reference point for tracking an installation position of the substrate support.
18. The substrate support of claim 7 , wherein the marking feature disposed on the substrate support corresponds to one of a plurality of models of substrate supports for identification of the model of the substrate support via imaging.
19. The processing system of claim 12 , wherein the marking feature disposed on the substrate support corresponds to one of a plurality of models of substrate supports for identification of the model of the substrate support via imaging.