Patent Assignment
Reel/Frame 063293/0700
Assignment of Assignor's Interest
Recorded: 2023-04-11
Pages: 3
Assignors
HUANG, YAO-SHENG
Executed: 2023-04-06
CHANG, HSIANG-PI
Executed: 2023-04-06
LEE, SHEN-YANG
Executed: 2023-04-06
CHAO, HUANG-LIN
Executed: 2023-04-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Gas Phase Treatment for Manufacturing Semiconductor Structure
Application:
18/298,094 →
Publication:
US 2024/0339329