Patent Assignment
Reel/Frame 063306/0517
Assignment of Assignor's Interest
Recorded: 2023-04-12
Pages: 7
Assignors
KIM, KYUNGRIM
Executed: 2023-03-06
KIM, DOWON
Executed: 2023-03-07
KIM, SUNJA
Executed: 2023-03-07
KIM, YOUNGEUN
Executed: 2023-03-06
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Canister, Precursor Transfer System Having the Same and Method for Measuring Precursor Remaining Amount Thereof