Canister, precursor transfer system having the same and method for measuring precursor remaining amount thereof
A canister supplying a precursor to a processing chamber includes a body, a first valve introducing a carrier gas into the body, a second valve discharging a sublimated gas of a solid precursor into a processing chamber, a precursor accommodating tray accommodating the solid precursor, and at least one piezoelectric transducer at least one of vibrating the precursor accommodating tray or measuring a resonance frequency.
1 . A method of forming a precursor transfer system, the method comprising:
providing a processing chamber; and
forming a canister configured to supply a sublimated gas of a solid precursor to the processing chamber,
wherein the precursor transfer system comprises:
a carrier gas supply device configured to discharge a carrier gas;
the canister configured to receive the carrier gas through a first pipe and to discharge a mixed gas comprising the sublimated gas of the solid precursor through a second pipe;
a reaction gas supply device configured to discharge at least one reaction gas through a third pipe; and
the processing chamber configured to provide the mixed gas and the at least one reaction gas to a substrate on a chuck,
wherein the canister comprises:
a body;
a first valve configured to introduce the carrier gas into the body;
a second valve configured to discharge the sublimated gas of the solid precursor into the processing chamber;
a precursor accommodating tray configured to accommodate the solid precursor; and
at least one piezoelectric transducer configured to at least one of vibrate the precursor accommodating tray or measure a resonance frequency of the canister.
2 . The method of claim 1 , wherein the canister further comprises a controller configured to control the at least one piezoelectric transducer.
3 . The method of claim 2 , wherein the controller is configured to calculate a change in mass of the solid precursor using the resonance frequency measured by the at least one piezoelectric transducer.
4 . The method of claim 2 , wherein the controller is configured to release vapor trapped between particles of the solid precursor at least in part by controlling the at least one piezoelectric transducer.
5 . The method of claim 2 , wherein the at least one piezoelectric transducer is configured to vibrate the precursor accommodating tray at the measured resonance frequency.
6 . The method of claim 1 , wherein the solid precursor comprises at least one of MoO 2 Cl 2 or MoCl 5 .
7 . The method of claim 1 , wherein the body comprises a heating unit.
8 . The method of claim 7 , wherein the heating unit is on an outer circumferential surface of the body.
9 . The method of claim 1 , wherein the at least one piezoelectric transducer is inside the precursor accommodating tray.
10 . The method of claim 1 , wherein the canister further comprises a monitor configured to calculate a remaining amount of the solid precursor based at least in part on the resonance frequency and to monitor the remaining amount of the solid precursor.
11 . A method of forming a precursor transfer system, the method comprising:
providing a processing chamber; and
forming a canister configured to supply a sublimated gas of a solid precursor to the processing chamber,
wherein the precursor transfer system comprises:
a carrier gas supply device configured to discharge a carrier gas;
the canister configured to receive the carrier gas through a first pipe and to discharge a mixed gas comprising the sublimated gas of the solid precursor through a second pipe;
a reaction gas supply device configured to discharge at least one reaction gas through a third pipe; and
the processing chamber configured to provide the mixed gas and the at least one reaction gas to a substrate on a chuck, and
wherein the canister comprises a piezoelectric transducer configured to vibrate a precursor accommodating tray to accommodate the solid precursor or measure a resonance frequency of the canister.
12 . The method of claim 11 , wherein the precursor transfer system further comprises:
a controller configured to control the piezoelectric transducer.
13 . The method of claim 12 , wherein the controller is configured to measure the resonance frequency at least in part by controlling the piezoelectric transducer, and wherein the controller is configured to calculate a remaining amount of the solid precursor in the canister using the measured resonance frequency.
14 . The method of claim 12 , wherein the controller is configured to vibrate the canister using the resonance frequency as a vibration frequency at least in part by controlling the piezoelectric transducer.
15 . The method of claim 11 , wherein the canister comprises the precursor accommodating tray configured to accommodate the solid precursor, and the precursor accommodating tray is configured to stack a plurality of support vessels.
16 . A method of operating a precursor transfer system configured to accommodate a solid precursor, the method comprising:
detecting a resonance frequency of a canister using a piezoelectric transducer; and
calculating a remaining amount of the solid precursor based at least in part on the detected resonance frequency,
wherein the piezoelectric transducer is configured to vibrate a precursor accommodating tray or measure the resonance frequency of the canister.
17 . The method of claim 16 , further comprising vibrating the canister at the measured resonance frequency.
18 . The method of claim 16 , further comprising introducing a carrier gas from a carrier gas supply device.
19 . The method of claim 16 , further comprising heating the solid precursor to sublimate the solid precursor.
20 . The method of claim 16 , further comprising displaying the remaining amount of the solid precursor calculated in the calculating.