Patent Assignment
Reel/Frame 063377/0193
Assignment of Assignor's Interest
Recorded: 2023-04-19
Pages: 3
Assignor
KIYOTOMI, AKIKO
Executed: 2023-01-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Warpage Amount Estimation Apparatus and Warpage Amount Estimation Method