Patent Assignment
Reel/Frame 063508/0161
Assignment of Assignor's Interest
Recorded: 2023-05-02
Pages: 5
Assignors
LAN, HAO-YU
Executed: 2019-06-19
CHENG, PO-CHUNG
Executed: 2019-08-05
HUANG, CHING-JUINN
Executed: 2019-07-31
FU, TZUNG-CHI
Executed: 2019-07-28
LEE, TSUNG-YEN
Executed: 2019-07-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Lithography System and Method