Patent Assignment
Reel/Frame 063515/0288
Assignment of Assignor's Interest
Recorded: 2023-05-02
Pages: 3
Assignors
MATSUMOTO, AKIHIRO
Executed: 2019-08-27
MATSUSHITA, MICHIAKI
Executed: 2019-08-28
MURATA, AKIRA
Executed: 2019-08-27
TASHIRO, MINORU
Executed: 2019-08-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Storage Apparatus, Substrate Storage Method, and Recording Medium