Patent Assignment
Reel/Frame 063556/0902
Assignment of Assignor's Interest
Recorded: 2023-05-05
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Wafer Handling Robot with Radial Gas Curtain and/or Interior Volume Control