Patent Assignment
Reel/Frame 063559/0658
Assignment of Assignor's Interest
Recorded: 2023-05-08
Pages: 5
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Calibration Method, Detection System, Exposure Apparatus, Article Manufacturing Method, and Non-Transitory Computer-Readable Storage Medium