Patent Assignment
Reel/Frame 063575/0266
Assignment of Assignor's Interest
Recorded: 2023-05-09
Pages: 4
Assignors
WANG, QIANG
Executed: 2023-05-08
CHEN, ZHIYING
Executed: 2023-05-08
VENTZEK, PETER LOWELL GEORGE
Executed: 2023-05-08
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Non-Intrusive Method for 2D/3D Mapping Plasma Parameters