Patent Assignment
Reel/Frame 063600/0183
Assignment of Assignor's Interest
Recorded: 2023-05-10
Pages: 8
Assignors
LIU, JUI-HSIUNG
Executed: 2023-05-03
LIAO, PIN-CHIA
Executed: 2023-05-02
LIN, TING-AN
Executed: 2023-04-28
SHIH, TING-AN
Executed: 2023-05-03
TSENG, YU-FANG
Executed: 2023-05-03
LIN, BURN JENG
Executed: 2023-05-01
GAU, TSAI-SHENG
Executed: 2023-05-01
CHEN, PO-HSIUNG
Executed: 2023-05-02
CHIU, PO-WEN
Executed: 2023-04-28
Assignees
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
NATIONAL TSING HUA UNIVERSITY
NO. 101, SEC. 2, KUANG FU RD., HSINCHU CITY, TAIWAN
Covered Property
(1)
Photoresist and Formation Method Thereof
Application:
18/314,566 →
Publication:
US 2024/0111210