Patent Assignment
Reel/Frame 063612/0844
Assignment of Assignor's Interest
Recorded: 2023-05-11
Pages: 4
Assignors
ZI, AN-REN
Executed: 2019-10-18
LIN, CHIN-HSIANG
Executed: 2019-10-22
CHANG, CHING-YU
Executed: 2019-10-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Protective Composition and Method of Forming Photoresist Pattern