Patent Assignment
Reel/Frame 063711/0519
Assignment of Assignor's Interest
Recorded: 2023-05-22
Pages: 5
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054-3299
Covered Property
(1)
System and Method for Ion Source Temperature Control Using Symmetric or Asymmetric Application of Force