Patent Assignment
Reel/Frame 063722/0370
Assignment of Assignor's Interest
Recorded: 2023-05-23
Pages: 4
Assignors
TSENG, HSIN-FU
Executed: 2023-05-07
TU, CHIH-CHIANG
Executed: 2023-05-08
WEN, CHIH-WEI
Executed: 2023-05-08
LU, CHIEN-HSING
Executed: 2023-05-05
HSU, TZU JENG
Executed: 2023-05-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Extreme Ultraviolet (Euv) Radiation Source Apparatus, Euv Lithography System, and Method for Generating Extreme Ultraviolet Radiation