Patent Assignment
Reel/Frame 063744/0147
Assignment of Assignor's Interest
Recorded: 2023-05-24
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Mechanism and Substrate Transferring Method