Patent Assignment
Reel/Frame 063763/0905
Assignment of Assignor's Interest
Recorded: 2023-05-25
Pages: 2
Assignor
YAMAGUCHI, YUJI
Executed: 2023-05-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Application:
17/912,614 →
Publication:
US 2023/0184487