Patent Assignment
Reel/Frame 063764/0673
Assignment of Assignor's Interest
Recorded: 2023-05-25
Pages: 4
Assignors
CHEN, CHIH-HAO
Executed: 2023-05-15
HUANG, CHUNG CHUAN
Executed: 2023-05-15
HSIEH, YI-TSANG
Executed: 2023-05-15
LIN, YU-CHI
Executed: 2023-05-18
CHAO, CHA-HSIN
Executed: 2023-05-18
TSAI, CHE-EN
Executed: 2023-05-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Plasma Processing Apparatus and Method