Patent Assignment
Reel/Frame 063767/0105
Assignment of Assignor's Interest
Recorded: 2023-05-25
Pages: 7
Assignors
SEO, IREH
Executed: 2023-05-15
LEE, CHANG-HA
Executed: 2023-05-15
YOON, TAEUNG
Executed: 2023-05-15
JEON, RAK-YOUNG
Executed: 2023-05-15
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
YONSEI UNIVERSITY, 50, YONSEI-RO, SEODAEMUN-GU, SEOUL, 120-749, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Process System and Method of Cleaning the Same
Application:
18/202,106 →
Publication:
US 2024/0141481