Patent Assignment
Reel/Frame 063782/0172
Assignment of Assignor's Interest
Recorded: 2023-05-28
Pages: 4
Assignor
KIM, HYUK
Executed: 2023-05-10
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Power Generator with Partial Sinusoidal Waveform, Plasma Processing Apparatus Including the Same and Method of Manufacturing Semiconductor Device Using the Same