Patent Assignment
Reel/Frame 063814/0623
Assignment of Assignor's Interest
Recorded: 2023-05-31
Pages: 4
Assignors
WANG, SHENG-MIN
Executed: 2023-05-14
HSIEH, KEN-HSIEN
Executed: 2023-05-07
LOPEZ, MANUEL ALEJANDRO FERNANDEZ
Executed: 2023-05-08
LAI, YU-TSE
Executed: 2023-05-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6,, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and System to Introduce Bright Field Imaging at Stitching Area of High-Na Euv Exposure