Assignment of Assignor's Interest

Recorded: 2023-06-01 Pages: 7

Assignors

WATANABE, KENJI

Executed: 2023-04-28

MURAKAMI, TAKESHI

Executed: 2023-04-28

TOMA, YASUSHI

Executed: 2023-04-28

TAJIMA, RYO

Executed: 2023-04-28

KARIMATA, TSUTOMU

Executed: 2023-04-28

Assignee

EBARA CORPORATION

11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN

Covered Property (1)

Method of Evaluating Primary Optical System of Electron Beam Observation Device, Evaluation Device Used Therefor, and Method of Manufacturing Same

Application: 18/326,051 →

Publication: US 2023/0393085