Patent Assignment
Reel/Frame 063847/0548
Assignment of Assignor's Interest
Recorded: 2023-06-03
Pages: 7
Assignors
SHAIKH, FAYAZ A.
Executed: 2019-08-24
VINTILA, ADRIANA
Executed: 2019-08-20
MUDROW, MATTHEW
Executed: 2019-08-19
LINEBARGER, JR., NICK RAY
Executed: 2019-08-20
YIN, XIN
Executed: 2019-08-19
LEE, JAMES F.
Executed: 2019-08-20
WILLIAMS, BRIAN JOSEPH
Executed: 2019-08-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Spatially Tunable Deposition to Compensate Within Wafer Differential Bow