Patent Assignment
Reel/Frame 063865/0428
Assignment of Assignor's Interest
Recorded: 2023-06-06
Pages: 4
Assignors
EOM, SUNGHUN
Executed: 2023-05-23
KIM, KANGSUL
Executed: 2023-05-23
SON, YOUNGJUN
Executed: 2023-05-23
CHOI, SEONGYEOL
Executed: 2023-05-23
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Cleaning a Back Side of a Substrate and Method of Cleaning a Back Side of a Substrate