Patent Assignment
Reel/Frame 063885/0732
Assignment of Assignor's Interest
Recorded: 2023-06-07
Pages: 2
Assignor
SHIBATA, TETSUYA
Executed: 2023-06-06
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Apparatus Control Method
Application:
18/330,887 →
Publication:
US 2023/0411189