Patent Assignment
Reel/Frame 063964/0564
Assignment of Assignor's Interest
Recorded: 2023-06-15
Pages: 3
Assignors
ZHANG, YU
Executed: 2023-06-13
AKIBA, AKI
Executed: 2023-06-13
LIU, ZHAOCHENG
Executed: 2023-06-13
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Etching Method with Metal Hard Mask