Patent Assignment
Reel/Frame 063971/0360
Assignment of Assignor's Interest
Recorded: 2023-06-16
Pages: 5
Assignors
CARCASI, MICHAEL
Executed: 2023-05-22
BERGLUND, SEAN
Executed: 2023-05-22
AGARWAL, ANKUR
Executed: 2023-05-22
GUECI, STEVEN
Executed: 2023-05-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods for Determining a Localized Fluid Velocity on a Spinning Substrate by Tracking Movement of a Tracer Across the Spinning Substrate