Patent Assignment
Reel/Frame 063971/0546
Assignment of Assignor's Interest
Recorded: 2023-06-16
Pages: 5
Assignors
CARCASI, MICHAEL
Executed: 2023-06-09
BERGLUND, SEAN
Executed: 2023-06-09
AGARWAL, ANKUR
Executed: 2023-06-09
HOOGE, JOSHUA
Executed: 2023-06-13
HETZER, DAVID
Executed: 2023-06-09
BRANDT, ROBERT
Executed: 2023-06-15
GUECI, STEVEN
Executed: 2023-06-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods for Determining a Fluid Height and/or a Fluid Velocity on a Spinning Substrate
Application:
18/210,773 →
Publication:
US 2024/0421009