Patent Assignment
Reel/Frame 063973/0569
Assignment of Assignor's Interest
Recorded: 2023-06-16
Pages: 2
Assignors
MIN, KYUNGSEOK
Executed: 2023-06-13
AN, SUKJUNE
Executed: 2023-06-13
SHIN, DONGGUNG
Executed: 2023-06-13
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Etching Gas Composition, Substrate Processing Apparatus, and Pattern Forming Method Using the Etching Gas Composition