Patent Assignment
Reel/Frame 063996/0244
Assignment of Assignor's Interest
Recorded: 2023-06-20
Pages: 5
Assignor
MUN, JEONGIL
Executed: 2023-06-09
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device
Application:
18/208,530 →
Publication:
US 2024/0412958