Patent Assignment
Reel/Frame 063998/0490
Assignment of Assignor's Interest
Recorded: 2023-06-20
Pages: 5
Assignor
KO, HYUNGSIK
Executed: 2023-06-07
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO,, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Focus Ring, Substrate Processing Apparatus Including the Same, and Semiconductor Fabrication Method Using the Same
Application:
18/211,887 →
Publication:
US 2024/0021417