Patent Assignment
Reel/Frame 064035/0698
Assignment of Assignor's Interest
Recorded: 2023-06-22
Pages: 5
Assignors
SUZUKI, TAICHI
Executed: 2023-02-02
MORIKAWA, YASUHIRO
Executed: 2023-02-02
DOI, KENTA
Executed: 2023-02-02
NAKAMURA, TOSHIYUKI
Executed: 2023-02-02
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Application:
18/213,228 →
Publication:
US 2023/0420220