Patent Assignment
Reel/Frame 064112/0537
Assignment of Assignor's Interest
Recorded: 2023-06-29
Pages: 3
Assignor
KUSUNOKI, ATSUKI
Executed: 2023-06-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Plasma Processing Method