Patent Assignment
Reel/Frame 064117/0013
Assignment of Assignor's Interest
Recorded: 2023-06-29
Pages: 6
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO,, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Euv Light Uniformity Control Apparatus, Euv Exposure Equipment Including the Same, and Method of Controlling Euv Light Uniformity by Using the Control Apparatus
Application:
18/216,142 →
Publication:
US 2024/0176247