Patent Assignment
Reel/Frame 064218/0132
Assignment of Assignor's Interest
Recorded: 2023-07-11
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Control Device, Substrate Processing System, and Method of Controlling Vacuum Valve Device