Patent Assignment
Reel/Frame 064227/0402
Assignment of Assignor's Interest
Recorded: 2023-07-12
Pages: 8
Assignors
SONG, MYUNGGEUN
Executed: 2023-03-20
KIM, SARAH
Executed: 2023-03-20
KIM, CHANGYUL
Executed: 2023-03-20
KIM, YOUNGHOON
Executed: 2023-03-20
PARK, JAEYONG
Executed: 2023-03-20
CHO, SUNGIL
Executed: 2023-03-22
CHO, TAEIL
Executed: 2023-03-20
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Inspection Method, Substrate Processing Method Including the Same, and Substrate Processing Device Using the Substrate Processing Method