Patent Assignment
Reel/Frame 064241/0939
Assignment of Assignor's Interest
Recorded: 2023-07-13
Pages: 8
Assignors
IWASA, TORAI
Executed: 2023-06-08
TANIKAWA, TAKEHIRO
Executed: 2023-06-14
HERAI, MASAYA
Executed: 2023-06-07
OSHIMA, KAZUKI
Executed: 2023-06-06
SAKAI, YUZURU
Executed: 2023-06-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus