Patent Assignment
Reel/Frame 064246/0479
Assignment of Assignor's Interest
Recorded: 2023-07-13
Pages: 3
Assignors
XU, YONGAN
Executed: 2022-01-18
WU, WEI
Executed: 2022-01-18
GODET, LUDOVIC
Executed: 2022-01-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for Preparing Small Features on a Substrate