Patent Assignment
Reel/Frame 064319/0753
Assignment of Assignor's Interest
Recorded: 2023-07-19
Pages: 10
Assignors
LIERTZER, MATTHIAS
Executed: 2023-07-05
SPENGLER, CHRISTOPH
Executed: 2023-07-05
NAETAR, WOLF
Executed: 2023-07-05
PLATZGUMMER, ELMAR
Executed: 2023-07-05
Assignee
IMS NANOFABRICATION GMBH
WOLFHOLZGASSE 20-24, BRUNN AM GEBIRGE, 2345, AUSTRIA
Covered Property
(1)
Correction of Thermal Expansion in a Lithographic Device
Application:
18/185,280 →
Publication:
US 2023/0296989