Patent Assignment
Reel/Frame 064322/0371
Assignment of Assignor's Interest
Recorded: 2023-07-20
Pages: 7
Assignors
WANG, YI-REN
Executed: 2019-04-08
LIN, HUNG-HUA
Executed: 2019-04-08
HSIEH, YUAN-CHIH
Executed: 2019-04-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Pizoelectric Mems Device with Electrodes Having Low Surface Roughness