Patent Assignment
Reel/Frame 064383/0822
Assignment of Assignor's Interest
Recorded: 2023-07-26
Pages: 8
Assignors
ADAMS, JOSHUA
Executed: 2019-02-26
LIN, YUXIANG
Executed: 2019-02-26
SHOME, KRISHANU
Executed: 2019-05-07
NIJMEIJER, GERRIT JOHANNES
Executed: 2019-03-07
AARTS, IGOR MATHEUS PETRONELLA
Executed: 2019-03-07
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Wafer Alignment Using Form Birefringence of Targets or Product