Patent Assignment
Reel/Frame 064391/0394
Assignment of Assignor's Interest
Recorded: 2023-07-26
Pages: 2
Assignor
SUMI, NORITAKE
Executed: 2023-07-12
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Replacement End Time Determination Method, Substrate Processing Method and Substrate Processing Apparatus
Application:
18/263,027 →
Publication:
US 2024/0105442