Patent Assignment
Reel/Frame 064412/0340
Assignment of Assignor's Interest
Recorded: 2023-07-28
Pages: 3
Assignors
SETIADI, AGUNG
Executed: 2023-06-13
MATSUDA, HIROKI
Executed: 2023-06-13
KAWAHARA, JUN
Executed: 2023-06-13
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Selective Deposition of Silicon Nitride and Structure Including Selectively-Deposited Silicon Nitride Layer