Patent Assignment
Reel/Frame 064413/0303
Assignment of Assignor's Interest
Recorded: 2023-07-28
Pages: 3
Assignor
KOSHIMIZU, CHISHIO
Executed: 2023-07-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method for Controlling Source Frequency of Source Radio-Frequency Power