Patent Assignment
Reel/Frame 064440/0082
Assignment of Assignor's Interest
Recorded: 2023-07-31
Pages: 6
Assignors
ROSTAMI, MEHRDAD
Executed: 2023-07-31
TSAI, YU-HAO
Executed: 2023-07-26
HISAMATSU, TORU
Executed: 2023-07-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
SELECTIVE ATOMIC LAYER ETCH OF Si-BASED MATERIALS
Application:
18/362,652 →
Publication:
US 2025/0046614